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Lingyun Xie
at Tsinghua Univ
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Publications (1)
Proceedings Article | 12 May 2004 Paper
Optimization design and fabrication of photonic crystal waveguides based on SOI using 248-nm deep-UV lithography
Proceedings Volume 5280, (2004) https://doi.org/10.1117/12.520153
KEYWORDS: Photonic crystals, Waveguides, Lithography, Silicon, Finite-difference time-domain method, Deep ultraviolet, Dielectrics, Light wave propagation, Etching, Photonic crystal devices
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