Mr. Baoshuai Liu Profile

Baoshuai Liu

Professor at Shanghai Jiao Tong Univ

SPIE Involvement:

Author

Publications (2)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 24 October 2017 Paper

Research and design on orthogonal diffraction grating-based 3D nanometer displacement sensor

Baoshuai Liu, Yibao Yuan, Zhehao Yin

Proceedings Volume 10458, 1045818 (2017) https://doi.org/10.1117/12.2285042

KEYWORDS: Diffraction gratings, Optical design, Diffraction, 3D metrology, Sensors

Read Abstract +

This study concerns an orthogonal diffraction grating-based nanometer displacement sensor. In this study, we performed calculation of displacements in the XYZ directions. In the optical measured path part, we used a two-dimensional orthogonal motion grating and a two-dimensional orthogonal reference grating with the pitch of 0.5um to measure the displacement of XYZ in three directions by detecting ±1st diffraction fringes. The self-collimated structure of the grating greatly extended the Z-axis range. We also simulated the optical path of the sensor with ZEMAX software and verified the feasibility of the scheme. For signal subdivision and processing, we combined large number counting (completed grating line) with small number counting (digital subdivision), realizing high multiples of subdivision of grating interference signals. We used PC to process the interference fringes and greatly improved the processing speed. In the scheme, the theoretical multiples of subdivision could reach 1024 with 10-bit AD conversion, but the actual multiples of subdivision was limited by the quality of the grating interference signals. So we introduced an orthogonal compensation circuit and a filter circuit to improve the signal quality.

Proceedings Article | 24 October 2017 Paper

Research on precise pneumatic-electric displacement sensor with large measurement range

Zhehao Yin, Yibao Yuan, Baoshuai Liu

Proceedings Volume 10458, 1045816 (2017) https://doi.org/10.1117/12.2284930

KEYWORDS: Sensors, Transducers

Read Abstract +

This research mainly focuses on precise pneumatic-electric displacement sensor which has large measurement range. Under the high precision, measurement range can be expanded so that the need of high precision as well as large range can be satisfied in the field of machining inspection technology. This research was started by the analysis of pneumatic-measuring theory. Then, an gas circuit measuring system which is based on differential pressure was designed. This designed system can reach two aims: Firstly, to convert displacement signal into gas signal; Secondly, to reduce the measurement error which caused by pressure and environmental turbulence. Furthermore, in consideration of the high requirement for linearity, sensitivity and stability, the project studied the pneumatic-electric transducer which puts the SCX series pressure sensor as a key part. The main purpose of this pneumatic-electric transducer is to convert gas signal to suitable electrical signal. Lastly, a broken line subsection linearization circuit was designed, which can nonlinear correct the output characteristic curve so as to enlarge the linear measurement range. The final result could be briefly described like this: under the condition that measuring error is less than 1μm, measurement range could be extended to approximately 200μm which is much higher than the measurement range of traditional pneumatic measuring instrument. Meanwhile, it can reach higher exchangeability and stability in order to become more suitable to engineering application.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years