Dr. Luuk Heijmans
at ASML Netherlands BV
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 19 February 2021 Open Access
Mark van de Kerkhof, Andrei Yakunin, Vladimir Kvon, Selwyn Cats, Luuk Heijmans, Manis Chaudhuri, Dmitry Asthakov
JM3, Vol. 20, Issue 01, 013801, (February 2021) https://doi.org/10.1117/12.10.1117/1.JMM.20.1.013801
KEYWORDS: Reticles, Plasma, Particles, Electrons, Extreme ultraviolet, Ions, Scanners, Extreme ultraviolet lithography, Protactinium, Electrodes

Proceedings Article | 23 March 2020 Paper
Mark van de Kerkhof, Andrei Yakunin, Vladimir Kvon, Ferdi van de Wetering, Selwyn Cats, Luuk Heijmans, Andrey Nikipelov, Adam Lassise, Vadim Banine
Proceedings Volume 11323, 113230Y (2020) https://doi.org/10.1117/12.2551020
KEYWORDS: Plasma, Particles, Ions, Extreme ultraviolet, Scanners, Hydrogen, Reticles, Particle contamination

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