We proposed a discrete microactuator enabling a nonlinear displacement with respect to digital input by employing electrostatic comb electrodes of curved shape. The comb electrodes were designed to implement a linearization in variable optical attenuator (VOA) with a constant step of 0.5 dB. The experimental insertion loss (IL) was 1.1 dB and attenuation range was 32.6 dB with 4.2% in linearity.
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