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Mario Dellagiovanna
at DNP Photomask Europe
SPIE Involvement:
Author
Publications (3)
Proceedings Article | 30 October 2007 Paper
A semi-automated AFM photomask repair process for manufacturing application using SPR6300
Mario Dellagiovanna, Hidenori Yoshioka, Hiroyuki Miyashita, Shiaki Murai, Takuya Nakaue, Osamu Takaoka, Atsushi Uemoto, Syuichi Kikuchi, Ryoji Hagiwara, Stephane Benard
Proceedings Volume 6730, 673020 (2007) https://doi.org/10.1117/12.746405
KEYWORDS: Atomic force microscopy, Critical dimension metrology, Particles, Photomasks, Image processing, Scanning electron microscopy, Diamond, Manufacturing, Contamination, Scanners
Proceedings Article | 14 June 2004 Paper
Identification of LiNbO3 compositions with optimized functional properties for advanced electro-optical devices
Federico Caccavale, David Callejo, Costanza Dragoni, Alessandro Morbiato, Mario Musolino, Fabiana Cavuoti, Mario Dellagiovanna, Federico Lucchi, Valerio Pruneri, Pietro Galinetto, Daniela Grando, Cinzia Sada
Proceedings Volume 5350, (2004) https://doi.org/10.1117/12.532308
KEYWORDS: Crystals, Lithium, Raman spectroscopy, Diffusion, Electro optics, Absorption, Modulators, Ultraviolet radiation, Temperature metrology, Waveguides
Proceedings Article | 2 May 1994 Paper
Disordering of InGaAs/GaAs strained quantum well structures induced by rare gas ion implantation
Sergio Pellegrino, C. Pignataro, Manuela Caldironi, M. Dellagiovanna, F. Vidimari, Alberto Carnera, A. Gasparotto
Proceedings Volume 2150, (1994) https://doi.org/10.1117/12.175013
KEYWORDS: Quantum wells, Diffusion, Argon, Annealing, Gallium arsenide, Helium, Luminescence, Ions, Indium, Ion implantation
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