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Dr. Mark J. Camenzind
CEO, Technologist, Chemist, Consultant at Camenzind Solutions LLC
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Publications (1)
Proceedings Article | 29 March 1999 Paper
Analysis of organic contaminants from silicon wafer and disk surfaces by thermal desorption-GC-MS
Mark Camenzind, Latif Ahmed, Anurag Kumar
Proceedings Volume 3619, (1999) https://doi.org/10.1117/12.343711
KEYWORDS: Semiconducting wafers, Silicon, Natural surfaces, Standards development, Manufacturing, Contamination, Head, Adhesives, Semiconductors, Reliability
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