Mr. Martin Gruhlke Profile

Martin Gruhlke

at Helmut-Schmidt Univ

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Proceedings Article | 25 April 2008 Paper

Development features in large-range nanoscale coordinate metrology

Martin Gruhlke, Christian Recknagel, Hendrik Rothe

Proceedings Volume 6995, 69950B (2008) https://doi.org/10.1117/12.780821

KEYWORDS: Atomic force microscopy, Interferometers, Laser sintering, Calibration, Binary data, Mirrors, Metrology, Sensors, Cameras, Data conversion

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The Nanometer-Coordinate-Measuring-Machine (NCMM) has the ability to scan large areas at nanometer resolution for the purpose of quality assurance of nanostructured products. The device combines a conventional atomic force microscope (AFM) with a precise positioning system. By locating the AFM at a fixed point and moving the sample with the positioning system a scan range of 2.5 x 2.5 x 0.5 cm³ and a repeatability of 0.1 nm is achieved. Since all movements of the positioning system are measured via laser interferometers, the Abbe-principle is kept in every dimension, the use of materials with a low thermal expansion coefficient (like Zerodur and FeNi36) and an overall coordinate system the system provides unique measurement conditions (traceability to the meter definition; repeatable and fast scans of the region of interest). In the past the NCMM was used to make the first large area scan of a microelectronic sample. Our present work focuses on automating critical dimension measurement through the use of a-priori-knowledge of the sample and optical navigation. A-priori-knowledge can be generated by the use of CAD-Data of the sample or scans with white light interferometry. Another present objective is the optimization of the measurement parameters for specific sample topologies using simulation and also empirical methods like the Ziegler-Nichols method. The need of efficient data processing and handling is also part of our current research.

Proceedings Article | 10 September 2007 Paper

Combining coordinate measurement and nanometrology for large-range nanoscale metrology

Martin Gruhlke, Hendrik Rothe

Proceedings Volume 6648, 66480I (2007) https://doi.org/10.1117/12.733527

KEYWORDS: Atomic force microscopy, Interferometers, Metrology, Temperature metrology, Sensors, Calibration, Mirrors, Image processing, Scanning probe microscopy, Atomic force microscope

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The Nanometer-Coordinate-Measuring-Machine (NCMM) is developed for comparatively fast large area scans with high resolution for measuring critical dimensions. The system combines a metrological atomic force microscope (AFM) with a precise positioning system. The sample is moved under the probe system via the positioning system achieving a scan range of 25 x 25 x 5 mm³ with a resolution of 1.24 nm. An AFM has a resolution beyond the wavelength of light and is a material-variable sensor. The cantilever of the used AFM can only be moved up and down via a monolytic piezoblock avoiding dynamic crosstalk. Combined with the up and down movement of the positioning system a multistage measurement is achieved. Through its overall coordinate system, the NCMM can scan very fast, since just regions of interest have to be scanned and no stitching procedures are needed afterwards. The measurements are traceable to the meter-definition since all movements of the drives and the AFMs cantilever are measured via laser-interferometers and the Abbé-principle is kept in every dimension. To meet thermal demands, materials with low thermal expansion coefficients are used and the metrological frame is kept small. A focus is on automating the measurements by the use of a-priori-knowledge of the sample, optical navigation and image processing.

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