Mr. Masanobu Hayashi Profile

Masanobu Hayashi

at KLA Japan

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 10 April 2024 Poster + Paper

Artificial intelligence measurement in imaging-based overlay metrology for performance boost

Sveta Grechin, Shlomit Katz, Kei Maeda, Tsumugi Hirasawa, Hisashi Otsubo, Seigo Aoki, Atsushi Takahashi, Atsushi Miyafuji, Ofer Manos, Yu Yang, Tal Levinson, Ran Trifon, Dor Yehuda, Hamode Hagaze, Yuval Lamhot, Yair Vardi, Yoav Grauer, Avner Safrani, Cindy Kato, Iwata Yasuhisa, Imura Koichi, Ito Kosuke, Hayashi Masanobu, Eunjoong An, Nana Lan, Simon Ahn, Nadav Gutman

Proceedings Volume 12955, 129552P (2024) https://doi.org/10.1117/12.3010281

KEYWORDS: Overlay metrology, Artificial intelligence, Semiconducting wafers, Education and training, Metrology, Evolutionary algorithms, Detection and tracking algorithms, Target acquisition, Performance modeling, Optical parametric oscillators

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Proceedings Article | 27 April 2023 Presentation + Paper

Machine learning robustness in overlay metrology

Udi Shusterman, Grechin Sveta, Boaz Ophir, Cindy Kato, Masanobu Hayashi, Shengxun Zhao, Jiehong Ng, Tomohiro Goto, Atsushi Imada, Manabu Miyake, Yasuki Takeuchi, Hiroyuki Mizuochi

Proceedings Volume 12496, 124960M (2023) https://doi.org/10.1117/12.2657438

KEYWORDS: Semiconducting wafers, Education and training, Data modeling, High volume manufacturing, Overlay metrology, Machine learning, 3D modeling, Metrology, Performance modeling, Object detection

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Proceedings Article | 22 February 2021 Presentation + Paper

Machine learning for Tool Induced Shift (TIS) reduction: an HVM case study

Boaz Ophir, Udi Shusterman, Anna Golotsvan, Cindy Kato, Masanobu Hayashi, Richika Kato, Tomohiro Goto, Taketo Kuriyama, Manabu Miyake, Yasuki Takeuchi, Hiroyuki Mizuochi

Proceedings Volume 11611, 116110E (2021) https://doi.org/10.1117/12.2590247

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