Dr. Matthew G. Hankins Profile

Dr. Matthew G. Hankins

at Sandia National Labs

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 16 January 2003 Paper

Diffusive transport in supercritical CO2 drying of MEMS structures

Paul Resnick, Matthew Hankins

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.478208

KEYWORDS: Diffusion, Microelectromechanical systems, Liquids, Carbon monoxide, Carbon dioxide, Etching, Interfaces, Process modeling, Semiconducting wafers, Capillaries

Read Abstract +

Proceedings Article | 16 January 2003 Paper

Vapor deposition of amino-functionalized self-assembled monolayers on MEMS

Matthew Hankins, Paul Resnick, Peggy Clews, Thomas Mayer, David Wheeler, Danelle Tanner, Richard Plass

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.478206

KEYWORDS: Coating, Microelectromechanical systems, Silicon, Humidity, Nitrogen, Self-assembled monolayers, Liquids, Semiconducting wafers, Molecules, Oxides

Read Abstract +

Proceedings Article | 2 October 2001 Paper

Optimization of anodic bonding to MEMS with self-assembled monolayer (SAM) coatings

Melissa Collins, Lauren Rohwer, Andrew Oliver, Matthew Hankins, Deidre Hirschfeld

Proceedings Volume 4558, (2001) https://doi.org/10.1117/12.443007

KEYWORDS: Silicon, Semiconducting wafers, Glasses, Wafer bonding, Microelectromechanical systems, Packaging, Self-assembled monolayers, Contamination, Interfaces, Epoxies

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years