Mr. Max Wenk Profile

Max Wenk

at Fraunhofer-ILT

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 12 March 2024 Presentation + Paper

Selective laser-induced etching for novel 3D microphotonic devices

Lara Beckmann, Toby Bi, Julian Thoms, Max Wenk, Shuangyou Zhang, Martin Kratz, Pascal Del'Haye

Proceedings Volume 12873, 1287303 (2024) https://doi.org/10.1117/12.3002335

KEYWORDS: Design, Quantum processes, Fabrication, Microresonators, Resonators, Silica, Etching, Annealing

Read Abstract +

In this work, we evaluate the advantages and limitations of the Selective Laser-induced Etching (SLE) process for the fabrication of novel three-dimensional microresonator structures. Microresonators are resonant optical structures with the ability to store light of a specific wavelength. They are used as non-linear optical components, in sensors or even in integrated photonic devices. These structures are characterized by the optical quality factor Q as a measure of the optical storage capabilities. Q is significantly influenced by a high-quality optical surface with low surface roughness. In addition to surface quality and small dimensions, from tens of microns to millimeters, high optical nonlinearity is a key requirement in these fields. The fabrication of 3D fused silica parts fulfilling these requirements is an ongoing challenge in the field of microfabrication in quantum technology. The SLE process is used to fabricate three-dimensional parts of transparent materials such as fused silica with a high degree of geometric freedom in a two-step process. In the first step, a model of the part is written into the material using Ultrashort Pulse (USP) laser radiation. In the second step, the laser-written shape is wet-chemically etched in aqueous KOH to expose the part. The fabrication of 2D disk microresonators with high Q-factors is evaluated by studying the surface roughness of the SLE process followed by polishing. The polished samples are characterized and Q-factors >107 are achieved. In addition, the extent to which dimensions and geometry differ between design and real SLE components is analyzed. The SLE process will thus be investigated as a possible process for the future fabrication of three-dimensional microresonators.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years