Ms. Mengjun Li Profile

Mengjun Li

at Rutgers State Univ of New Jersey

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Publications (2)

Proceedings Article | 13 March 2018 Presentation + Paper

Novel Sn-based photoresist for high aspect ratio patterning

Mengjun Li, Viacheslav Manichev, Fangzhou Yu, Danielle Hutchison, May Nyman, Torgny Gustafsson, Leonard Feldman, Eric Garfunkel

Proceedings Volume 10586, 105860K (2018) https://doi.org/10.1117/12.2297440

KEYWORDS: Ions, Silicon, Photoresist materials, Helium, Electrons, Gold, Monte Carlo methods, Extreme ultraviolet lithography, Etching

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Proceedings Article | 21 March 2016 Paper

Helium ion beam lithography (HIBL) using HafSOx as the resist

Feixiang Luo, Viacheslav Manichev, Mengjun Li, Gavin Mitchson, Boris Yakshinskiy, Torgny Gustafsson, David Johnson, Eric Garfunkel

Proceedings Volume 9779, 977928 (2016) https://doi.org/10.1117/12.2219239

KEYWORDS: Ions, Helium, Electrons, Electron beam lithography, Line edge roughness, Monte Carlo methods, Ion beam lithography, Extreme ultraviolet lithography, Silicon, Scanning helium ion microscopy

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