Mengqing Xu
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 19 December 2022 Paper
Xingxue Li, Bin Zhou, Mengqing Xu, Yuda Chen, Yihan Wang, Jin Wang, Changhe Zhou
Proceedings Volume 12318, 123180X (2022) https://doi.org/10.1117/12.2642142
KEYWORDS: Diffraction gratings, Defect detection, Optical inspection

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