Mr. Micah Johnson Profile

Micah Johnson

Research Assistant

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 19 September 2018 Presentation + Paper

Confocal microscopy for high-precision non-contact optical measurements

Micah Johnson, Charles Kankelborg, Rubin Meuchel, Roy Smart

Proceedings Volume 10747, 107470A (2018) https://doi.org/10.1117/12.2319597

KEYWORDS: Extreme ultraviolet, Diffraction gratings, Confocal microscopy, Photodiodes, Microscopes, Beam splitters, Spectrographs, Optical alignment

Read Abstract +

The EUV Snapshot Imaging Spectrograph (ESIS) is a slitless, tomographic imaging spectrograph for observing the solar transition region in extreme ultraviolet (EUV) at 63nm wavelength. An array of concave diffraction gratings re-image from the telescope prime focus to our CCD detectors. The instrument is aligned and focused in visible light, using substitute diffraction gratings ruled for the red HeNe laser line. To transfer precise alignment and focus of the visible gratings to the EUV gratings, we have developed a minitaturized, three point, noncontact measurement system, TEA (Transfer ESIS Alignment). TEA locates the grating surface using confocal microscopy, with three independent channels scanned together on a single stage, to specify the position and orientation of the spherical surface. Challenges for this measurement include the small size of the ESIS gratings (~ 16X20μm), their curved surfaces, diffraction effects, the alignment of tiny optics within TEA, and the mechanics used to repeatability mount the gratings. Our testing shows that the intrinsic repeatability of our measurement apparatus is approximately 2μm. In practice, however, our error is dominated by the process of mounting the grating subsystem in TEA, which introduces 12μm differences between subsequent runs. This level of repeatability meets our requirements for ESIS.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years