Dr. Michael A. Fury Profile

Dr. Michael A. Fury

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Process and applications development for electronic and electro-optic materials from Ceimig, Ltd. and Gwent Electronic Materials. Applications in sensors, MEMS, PV, microfluidics, biotechnology, printed electronics, and related areas.

Publications (1)

Proceedings Article | 15 January 2003 Paper

Direct thin film imaging (DTFI) based on PMOD (photochemical metal-organic deposition) methodology

Harold Madsen, Seigi Suh, Leo Svendsen, Shyama Mukherjee, Paul Roman, Michael Fury, Katy Ip

Proceedings Volume 4979, (2003) https://doi.org/10.1117/12.478292

KEYWORDS: Etching, Photoresist materials, Photomasks, Thin films, Optical lithography, Microelectromechanical systems, Silicon, Silicon films, Reactive ion etching, Photoresist developing

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