Dr. Michael S. Salib Profile

Dr. Michael S. Salib

Managing Director at Applied Materials

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 25 October 2005 Paper

Photonic crystal fabrication on silicon-on-insulator (SOI) using 248nm and 193nm lithography

Michael Salib, Albert Michaeli, Adi Lazar, Haviv Bechor, Michael Settle, Thomas Krauss

Proceedings Volume 6017, 60170B (2005) https://doi.org/10.1117/12.630918

KEYWORDS: Silicon, Lithography, Photonic crystals, Waveguides, Etching, Optical proximity correction, Electron beam lithography, 193nm lithography, Optical fabrication, Oxidation

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Proceedings Article | 31 January 2005 Paper

Silicon photonics: applications, recent results, and integration challenges as they relate to CMOS processing--an industry perspective

Oded Cohen, Mike Salib, Mike Morse, Mario Paniccia

Proceedings Volume 5624, (2005) https://doi.org/10.1117/12.583066

KEYWORDS: Silicon, Waveguides, Silicon photonics, Etching, Integrated optics, Optics manufacturing, Semiconducting wafers, Manufacturing, Packaging, Optical components

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