Dr. Minoru Takeda Profile

Dr. Minoru Takeda

Professor at Kyoto Institute of Technology

SPIE Involvement:

Author

Publications (10)

SPIE Journal Paper | 1 October 2004

Electron beam mastering process realized over a 100-GB/layer capacity disk

Minoru Takeda, Motohiro Furuki, Masanobu Yamamoto, Masataka Shinoda, Kimihiro Saito, Yuichi Aki, Hiroshi Kawase, Mitsuru Koizumi, Toshiaki Miyokawa, Masao Mutou

JM3, Vol. 3, Issue 04, (October 2004) https://doi.org/10.1117/12.10.1117/1.1793154

KEYWORDS: Silicon, Electron beams, Etching, Eye, Near field, Near field optics, Signal processing, Head, Reactive ion etching, Spindles

Read Abstract +

Proceedings Article | 9 September 2004 Paper

Recent progress in electron beam mastering for 100Gb/in2 and beyond

Motohiro Furuki, Minoru Takeda, Masanobu Yamamoto, Kimihiro Saito, Masataka Shinoda, Toshihiro Fujiki, Yuichi Aki, Mitsuru Koizumi, Toshiaki Miyokawa, Masao Muto

Proceedings Volume 5380, (2004) https://doi.org/10.1117/12.562121

KEYWORDS: Silicon, Electron beams, Signal processing, Monte Carlo methods, Near field, Head, Objectives, Modulation, Reactive ion etching, Etching

Read Abstract +

Proceedings Article | 9 September 2004 Paper

High-density near-field optical disc recording using phase change media and polycarbonate substrate

Masataka Shinoda, Kimihiro Saito, Tsutomu Ishimoto, Takao Kondo, Ariyoshi Nakaoki, Motohiro Furuki, Minoru Takeda, Yuji Akiyama, Takashi Shimouma, Masanobu Yamamoto

Proceedings Volume 5380, (2004) https://doi.org/10.1117/12.556287

KEYWORDS: Near field, Near field optics, Optical discs, Eye, Servomechanisms, Optical recording, Solids, Silicon, Laser sources, Light

Read Abstract +

Proceedings Article | 16 September 2003 Paper

High-density near-field readout over 100-GB capacity using a solid immersion lens with NA of 2.05

Masataka Shinoda, Kimihiro Saito, Tsutomu Ishimoto, Takao Kondo, Ariyoshi Nakaoki, Motohiro Furuki, Minoru Takeda, Masanobu Yamamoto

Proceedings Volume 5069, (2003) https://doi.org/10.1117/12.533118

KEYWORDS: Near field, Near field optics, Solids, Refractive index, Optical discs, Silicon, Actuators, Surface finishing, Modulation, Monochromatic aberrations

Read Abstract +

Proceedings Article | 16 September 2003 Paper

Electron beam mastering process realizing over 100-GB/layer capacity disc

Minoru Takeda, Motohiro Furuki, Masanobu Yamamoto, Masataka Shinoda, Kimihiro Saito, Yuichi Aki, Hiroshi Kawase, Mitsuru Koizumi, Toshiaki Miyokawa, Masao Mutou

Proceedings Volume 5069, (2003) https://doi.org/10.1117/12.533039

KEYWORDS: Silicon, Electron beams, Eye, Etching, Near field, Near field optics, Signal processing, Reactive ion etching, Modulation, Atomic force microscopy

Read Abstract +

Proceedings Article | 16 September 2003 Paper

Improvement of near-field mastering with a 266-nm laser

Shingo Imanishi, Minoru Takeda, Masanobu Yamamoto, Nobuhiko Mukai, Katsuji Takagi, Toshiyuki Kono

Proceedings Volume 5069, (2003) https://doi.org/10.1117/12.532755

KEYWORDS: Photoresist materials, Near field, Objectives, Servomechanisms, Interferometers, Wavefronts, Beam splitters, Laser stabilization, Photoresist developing, Solids

Read Abstract +

Proceedings Article | 28 June 1999 Paper

Deep-UV mastering with a write compensation technique realizing over 20-GB/layer capacity disk

M. Takeda, Motohiro Furuki, Tsutomu Ishimoto, Kenji Kondo, Masanobu Yamamoto, Shigeo Kubota

Proceedings Volume 3864, 386401 (1999) https://doi.org/10.1117/12.997560

KEYWORDS: Deep ultraviolet, Signal processing, Bragg cells, Signal analyzers, Semiconductor lasers, Digital video discs, Interference (communication), Second-harmonic generation, Silica, Objectives

Read Abstract +

Proceedings Article | 23 October 1998 Paper

All-solid-state continuous-wave 266-nm laser for optical disk mastering

Michio Oka, Minoru Takeda, Toshiyuki Kashiwagi, Masanobu Yamamoto, Michihiko Sakamoto, Kenji Kondo, Koichi Tatsuki, Shigeo Kubota

Proceedings Volume 3401, (1998) https://doi.org/10.1117/12.327916

KEYWORDS: Ultraviolet radiation, Continuous wave operation, Optical discs, Disk lasers, Mirrors, Optical testing, Laser optics, Nd:YAG lasers, Diffraction, Reliability

Read Abstract +

Proceedings Article | 7 June 1996 Paper

Efficient all-solid state 213-nm laser source for microlithography

Shigeo Kubota, Werner Wiechmann, Ling Yi Liu, Michio Oka, Hiroki Kikuchi, Hiroshi Suganuma, Hisashi Masuda, Minoru Takeda

Proceedings Volume 2726, (1996) https://doi.org/10.1117/12.240946

KEYWORDS: Nd:YAG lasers, Second-harmonic generation, Optical lithography, Crystals, Absorption, Laser sources, Q switched lasers, Light sources, Nonlinear crystals, Continuous wave operation

Read Abstract +

Proceedings Article | 26 May 1995 Paper

Deep-UV lithography using continuous-wave 266-nm radiation from an all solid state frequency quadrupled Nd:YAG laser

Hiroshi Suganuma, Minoru Takeda, Michio Oka, Naoto Ozaki, Motohisa Haga, Shigeo Kubota

Proceedings Volume 2440, (1995) https://doi.org/10.1117/12.209243

KEYWORDS: Nd:YAG lasers, Lithography, Continuous wave operation, Diffusers, Speckle, Objectives, Light sources, Excimer lasers, Deep ultraviolet, Solid state lasers

Read Abstract +

Showing 5 of 10 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years