Ms. Nagamani Pathuri Profile

Nagamani Pathuri

at Univ of Dayton

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 13 April 2007 Paper

Visualization of buried structures in atomic force acoustic microscopy

André Striegler, Bernd Köhler, Beatrice Bendjus, Nagamani Pathuri, Norbert Meyendorf

Proceedings Volume 6528, 65281B (2007) https://doi.org/10.1117/12.716863

KEYWORDS: Atomic force microscopy, Microscopy, Acoustics, Ultrasonics, Ion beams, Visualization, Scanning probe microscopy, Nondestructive evaluation, Ultrasonography, Silicon

Read Abstract +

Advanced Scanning Probe Microscopy (SPM) modes such as Atomic Force Acoustic Microscopy (AFAM) and Ultrasonic Force Microscopy (UFM) combine Atomic Force Microscopy (AFM) with an excitation of the sample or cantilever by ultrasound. These techniques become increasingly powerful tools for the determination of material properties on nanoscale. Non-destructive evaluation of subsurface and buried structures is getting more and more important in semiconductor industries and electronics system integration technology. Existing methods that allow subsurface measurements with high local resolution are mostly based on destructive concepts as surface ablation by Focused Ion Beam (FIB) devices. It is widely discussed in literature that AFAM and UFM techniques should have the capability to detect subsurface features. But direct proofs of this capability are hard to find. The difficulty comes from the point that in UFM and AFAM images besides elastic contrast also topological contrast is mixed in. So, for a direct proof samples are needed which (a) show subsurface contrast and (b) having definitely no surface topology correlated with the subsurface feature in question. These samples are not so easy to obtain. An appropriate sample fabrication technology was developed based on the focussed ion beam technique. Using the machined samples the buried structure visibility for the AFAM technique could be proved uniquely. The results are compared with conclusions from modelling.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years