Norikazu Takeuchi
at KIOXIA Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 10 April 2024 Presentation
Masaki Mitsuyasu, Norikazu Takeuchi, Masanori Hirose, Shunsuke Honda, Akihiko Ando, Toshiaki Komukai, Motofumi Komori, Takuya Kono
Proceedings Volume PC12956, PC129560G (2024) https://doi.org/10.1117/12.3010093
KEYWORDS: Nanoimprint lithography, Overlay metrology, Optical lithography, Line edge roughness, High volume manufacturing, Etching, Yield improvement, Sustainable technology, Semiconductors, Semiconducting wafers

Proceedings Article | 1 May 2023 Presentation + Paper
Norikazu Takeuchi, Genna Hasegawa, Toshiaki Komukai, Takahiro Iwasaki, Masayuki Hatano, Motofumi Komori, Takuya Kono
Proceedings Volume 12497, 124970E (2023) https://doi.org/10.1117/12.2657912
KEYWORDS: Silica, Photoresist processing, Electron beam lithography, Resistance, Semiconducting wafers, Fabrication, Optical lithography, Lithography

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