Dr. P. Y. Hung
at SEMATECH Inc
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 19 March 2015 Paper
P. Hung, Thomas O'Loughlin, Aaron Lewis, Rimma Dechter, Martin Samayoa, Sarbajit Banerjee, Erin Wood, Angela R. Hight Walker
Proceedings Volume 9424, 94241S (2015) https://doi.org/10.1117/12.2175623
KEYWORDS: Raman spectroscopy, Gold, Silicon, Scanning electron microscopy, Metrology, Transmission electron microscopy, Etching, Atomic force microscopy, Particles, Spatial resolution

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