Calcium fluoride exhibits a fluence dependent transmission behavior at the 193 nm excimer laser wavelength of interest for photolithography applications. The transmission as a function of fluence is determined using a 193 nm excimer laser based transmission measurement system. Different transmission decay rate and saturation level is observed and correlated with structural defects and impurities. Thermally stimulated current measurements are applied to identify defects and correlate the relative concentration of mobile anion vacancies with fluence dependent transmission.
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