A fast model-order reduction algorithm is proposed for microelectromechanical devices. By breaking the system
matrices obtained from FEM methods down into smaller ones, the proposed algorithm will reduce computational
cost and memory requirements required by the inversion operation of the system matrix. As an example,
experimental studies are presented for a linear-drive multiple-mode resonator demonstrating that predicted
results are in very good agreement with results from previous publications.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.