Mr. Pengjie Kong Profile

Pengjie Kong

at Univ of Chinese Academy of Sciences

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Publications (2)

SPIE Journal Paper | 15 May 2023

Optimization of chemically amplified resist formulation based on simple random sampling and kernel density estimation

Pengjie Kong, Lisong Dong, Xu Ma, Yayi Wei

JM3, Vol. 22, Issue 02, 024601, (May 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.2.024601

KEYWORDS: Photoresist materials, Chemically amplified resists, Sampling rates, Photoresist developing, Chemical analysis, Quenching, Absorption, Statistical analysis, Refractive index, Matrices

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Proceedings Article | 1 May 2023 Poster + Paper

Predicting the critical features of the chemically-amplified resist profile based on machine learning

Pengjie Kong, Lisong Dong, Xu Ma, Yayi Wei

Proceedings Volume 12498, 124981U (2023) https://doi.org/10.1117/12.2658664

KEYWORDS: Photoresist materials, Neural networks, Machine learning, Artificial neural networks, Cadmium sulfide, Photoresist developing, Chemically amplified resists, Education and training, Computer simulations, Optical proximity correction

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