Mr. Peter Paquet Profile

Peter Paquet

at KLA

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Publications (1)

Proceedings Article | 10 April 2024 Poster + Paper

Enable in-die overlay measurement on DRAM storage node by line scan self-calibration method

Fang-Jyun (June) Yeh, Shang-Hong (Sam) Tsai, Cheng An Lin, Cheng Wei Yang, Kai Ping Chan, Cheng Ta Cheng, Foster Huang, Henry Chen, Cheng-Hang Yang, Yun-Ju (York) Yang, Peter Paquet, Houssam Chouaib, Zhengquan Tan

Proceedings Volume 12955, 129552D (2024) https://doi.org/10.1117/12.3009960

KEYWORDS: Overlay metrology, Mueller matrices, Machine learning, Education and training, Semiconducting wafers, Calibration, Transmission electron microscopy, Metrology, Chemical elements, Algorithm development

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