Dr. Philip C. Efthimion Profile

Dr. Philip C. Efthimion

Head Plasma Science & Technology Dept at Princeton Plasma Physics Lab

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Publications (2)

Proceedings Article | 16 October 2017 Paper

A new objective for EUV lithography, EUV microscopy, and 2D x-ray imaging

Manfred Bitter, Kenneth Hill, Philip Efthimion, Jian Lu, Brian Kraus, Lan Gao, Luis Delgado-Aparicio, Novimir Pablant

Proceedings Volume 10450, 1045024 (2017) https://doi.org/10.1117/12.2281624

KEYWORDS: X-ray imaging, Extreme ultraviolet, X-rays, Extreme ultraviolet lithography, Spherical lenses, Reflectors, Photomasks, Crystals, Semiconducting wafers, Patents

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Proceedings Article | 17 September 2014 Paper

Development of spatially resolved high resolution x-ray spectroscopy for fusion and light-source research

J. Lu, K. Hill, M. Bitter, L. Delgado-Aparicio, N. Pablant, P. Efthimion, P. Beiersdorfer, H. Chen, K. Widmann, M. Sanchez del Rio

Proceedings Volume 9209, 92090M (2014) https://doi.org/10.1117/12.2062192

KEYWORDS: Crystals, X-rays, Spectroscopy, Sensors, Plasma, Spatial resolution, Spectral resolution, X-ray imaging, Temperature metrology, X-ray detectors

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