Dr. Qiang Liu
at Xi’an Jiaotong Univ.
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 7 March 2019 Paper
Proceedings Volume 11053, 110534O (2019) https://doi.org/10.1117/12.2517191
KEYWORDS: Electron beam lithography, Diffractive optical elements, Fabrication, Diffraction, Genetic algorithms, Super resolution, Optical design

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