Dr. Ramana Murthy Badam Profile

Dr. Ramana Murthy Badam

at Institute of Microelectronics

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Publications (3)

Proceedings Article | 7 March 2007 Paper

Fabrication technology of Si microfluidic devices for microbial cell trapping

Ramana Badam, Liang Zhu, Cheng Yong Teo, Xueli Peh, Hongmiao Ji, Hanhua Feng, Wen-Tso Liu

Proceedings Volume 6462, 64620E (2007) https://doi.org/10.1117/12.698926

KEYWORDS: Silicon, Etching, Biological research, Dielectrics, Photomasks, Microfabrication, High aspect ratio silicon micromachining, Reactive ion etching, Microfluidics, Semiconducting wafers

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Proceedings Article | 20 December 2004 Paper

New fabrication technology for photonic crystal waveguides

Sohan Singh Mehta, B. Ramana Murthy, Zhao Hui, * Suryani, Wei Ji, Mahadevan Iyer, My Doan

Proceedings Volume 5577, (2004) https://doi.org/10.1117/12.567602

KEYWORDS: Photomasks, Scanning electron microscopy, Reticles, Deep ultraviolet, Optical lithography, Silicon, Lithography, Amorphous silicon, Etching, Photonic crystals

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Proceedings Article | 20 December 2004 Paper

Spot size mode converter for efficient coupling to SiN waveguides

My Doan, Chi Tsang, Badam Ramana Murthy, Babu Narayanan, Chang Kuo Chang, Sohan Singh Mehta, Kuan Yap, Desmond Lim

Proceedings Volume 5577, (2004) https://doi.org/10.1117/12.567578

KEYWORDS: Waveguides, Fiber couplers, Silicon, Cladding, Etching, Wave propagation, Clocks, Photonic integrated circuits, Single mode fibers, Structured optical fibers

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