Mr. Robert Melzer Profile

Robert Melzer

at GLOBALFOUNDRIES Dresden Module One LLC & Co KG

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Publications (2)

Proceedings Article | 28 March 2017 Presentation + Paper

Combined process window monitoring for critical features

Carsten Hartig, Bernd Schulz, Robert Melzer, Matthias Ruhm, Daniel Fischer, Stefan Buhl, Boris Habets, Martin Rößiger, Manuela Gutsch

Proceedings Volume 10145, 101450U (2017) https://doi.org/10.1117/12.2259910

KEYWORDS: Electrical breakdown, Semiconducting wafers, Critical dimension metrology, Overlay metrology, Computer simulations, Lithography, Metals, Optical lithography, Feature extraction, Distance measurement

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Proceedings Article | 19 March 2015 Paper

Through pitch monitoring by optical scatterometry

R. Melzer, C. Hartig, Gunter Grasshof, B. Sass, F. Koch, Z. Xu, Z. Shen, J Engelmann

Proceedings Volume 9424, 942429 (2015) https://doi.org/10.1117/12.2076151

KEYWORDS: Single crystal X-ray diffraction, Etching, Critical dimension metrology, Semiconducting wafers, Optical proximity correction, Scatterometry, Transmission electron microscopy, Silicon, Modeling, Microelectronics

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