Ms. Rumi Ito Profile

Rumi Ito

at NuFlare Technology Inc

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 12 October 2021 Presentation + Paper

Study on modeling of resist surface charge effect on mask blanks with charge dissipation layer in electron beam mask writers

Haruyuki Nomura, Noriaki Nakayamada, Takashi Kamikubo, Reiko Nishimura, Rumi Ito, Yoshinori Kojima

Proceedings Volume 11855, 118550X (2021) https://doi.org/10.1117/12.2600774

KEYWORDS: Electron beams, Photomasks, Diffusion, Electromagnetism, Metrology, Line edge roughness, Data modeling, Scattering, Lithography, Laser scattering

Read Abstract +

Proceedings Article | 20 September 2020 Poster + Presentation + Paper

Study on physical model of resist surface charge in electron beam mask writer EBM-9500PLUS

Haruyuki Nomura, Noriaki Nakayamada, Takehiko Katsumata, Rumi Ito, Yoshinori Kojima

Proceedings Volume 11518, 115180Z (2020) https://doi.org/10.1117/12.2572199

KEYWORDS: Electron beams, Statistical modeling, Photomasks, Vestigial sideband modulation, Diffusion

Read Abstract +

Proceedings Article | 23 March 2020 Paper

Contribution ratio of process fidelity and beam accuracy in multi-beam mask writing

Rumi Ito, Yoshinori Kojima, Hiroshi Matsumoto

Proceedings Volume 11324, 113241A (2020) https://doi.org/10.1117/12.2551847

KEYWORDS: Line edge roughness, Spatial frequencies, Image processing, Etching, Photomasks, Optical lithography, Chromium, Photoresist processing, Picosecond phenomena, Edge roughness

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years