Mr. Ryuta Furuya Profile

Ryuta Furuya

at Ushio Inc.

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Author

Publications (2)

Proceedings Article | 1 December 2022 Presentation + Paper

High-brightness LDP source for EUVL mask inspection

Ryuta Furuya, Kazuya Aoki, Yusuke Teramoto, Takahiro Shirai, Shunichi Morimoto, Hirdenori Watanabe, Akihisa Nagano, Daisuke Yajima, Noritaka Ashizawa, Yoshihiko Sato

Proceedings Volume 12292, 122920G (2022) https://doi.org/10.1117/12.2641777

KEYWORDS: Plasma, Extreme ultraviolet, Electrodes, Inspection, Photomasks, Light sources, Extreme ultraviolet lithography, Ions, Cameras, Laser irradiation

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Proceedings Article | 17 September 2018 Presentation + Paper

Forming an ultrathin and lightweight Wolter type-1 x-ray micropore optics into a single substrate

K. Nomoto, R. Hata, K. Doi, Y. Nawaki, D. Yajima, R. Furuya, K. Shinoda, K. Tsuruoka, H. Kodaka

Proceedings Volume 10760, 107600A (2018) https://doi.org/10.1117/12.2313125

KEYWORDS: X-rays, Mirrors, Reflectivity, Glasses, X-ray optics, Surface roughness, Polishing, Etching, Diffraction, Surface finishing

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In this paper, we propose a new glass Micropore Optics (MPO), which forms a Wolter type-1 optical system into a single glass substrate without bending or alignment. We call this new X-ray condenser mirror as NXCM. In recent years, lightweight and high-productivity X-ray optics have been demanded for small satellite and detector calibration. We aim to develop a high-performance X-ray MPO by applying our fine patterning and design techniques on the basis of semiconductor-based micromachining technologies. Generally, reducing process steps and cutting out error factors make “productivity” and “resolution” better. It has been expected to form a Wolter type-1 optics directly on a base substrate. Therefore, we focused on the process technology using femtosecond laser irradiation and wet etching, which can form arbitrary fine three-dimensional structure in glass substrate, and applied this technology to MPO fabrication. Using this technique, we successfully achieved to form the two-step oblique grooves machining of 1.7 degrees in the primary stage and 5.1 degrees in the secondary stage with groove widths of 20 μm and 40 μm to the flat glass t 0.5 mm. The groove structure was confirmed by cross-sectional image. The surface roughness of the groove side wall serving as the X-ray reflection surface is expected to be improved by the better scanning of femtosecond laser and the magnetic fluid polishing process. Based on the results, we are proceeding with the production of a condenser mirror prototype while optimizing the coating process and polishing process. In this paper, we report the simulation result of focusing performance and the achievement of the fabrication process in consideration of machining accuracy and error factors. With this method, the higher aspect structure is achieved by stacking several substrates in the optical axis direction or the large area structure is achieved by tiling in the plane direction. The various types of optical structure can be considered with this method.

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