Dr. Sean F. Romanuik Profile

Dr. Sean F. Romanuik

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 17 March 2023 Presentation + Paper

The effect of etched air cavities underneath the finite bottom oxide cladding of silicon nitride single-strip optical waveguides

Sean Romanuik, Ramanand Tewari, L. Richard Williston, Kazem Zandi

Proceedings Volume 12424, 124240R (2023) https://doi.org/10.1117/12.2649221

KEYWORDS: Waveguides, Cladding, Silicon, Simulations, Photonics, Optical resonators, Gyroscopes, Etching

Read Abstract +

High performance photonic gyroscope microchips need ring resonators with high quality factors and low loss waveguides for enhanced accuracy. The industry trend is toward thin ring resonators with thick cladding layers above and below the waveguides. Thick cladding layers are typically required to ensure that the guided light’s fields extending out from the waveguide are negligible before reaching any lossy material beyond the cladding layers. Otherwise, a significant portion of the field would be attenuated by the lossy material, thereby increasing the waveguide’s overall propagation losses. However, thick cladding layers are undesirable from a process cost standpoint. We show that cavities etched below waveguides facilitate much thinner bottom cladding without increasing waveguide propagation losses. Commercial software computed the light within 100 nm thick and 40 nm thick waveguide designs as a function of their bottom cladding thickness. These simulations show that, with the underlying cavities, a 2 μm thick bottom cladding layer sufficiently confines the 100 nm thick waveguide’s light. In the case of the 40 nm thick waveguide, this minimum cladding thickness was 3 μm. With these cavities, conventional bottom cladding thicknesses, normally 8 μm and 15 μm, respectively, are no longer necessary. 100 nm thick Si₃N₄ waveguides with 3 μm thick SiO₂ bottom cladding layers were then fabricated, with and without cavities, alongside horizontally coupled coplanar ring resonators. Characterization of the fabricated structures show that the cavities reduce waveguide loss and improve ring resonator quality factor by a factor of three.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years