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Sebastiaan P. Huber
at FOM Institute DIFFER
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Publications (1)
Proceedings Article | 27 September 2013 Paper
Engineering optical constants for broadband single layer antireflection coatings
S. Huber, R. van de Kruijs, A. Yakshin, E. Zoethout, F. Bijkerk
Proceedings Volume 8848, 884814 (2013) https://doi.org/10.1117/12.2026546
KEYWORDS: Reflectivity, Antireflective coatings, Deep ultraviolet, Thin films, Multilayers, Extreme ultraviolet, Extreme ultraviolet lithography, Silicon, Optical engineering, Mirrors
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