Sergey N. Averkin
at Institute of Physics and Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 March 2019 Paper
A. Miakonkikh, S. Averkin, K. Rudenko, V. Lukichev
Proceedings Volume 11022, 110221X (2019) https://doi.org/10.1117/12.2522505
KEYWORDS: Etching, Silicon, Plasma, Oxidation, Oxides, Semiconducting wafers, Plasma etching, Photomasks, Oxygen, Fluorine

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