Ms. Seunghye Kim Profile

Seunghye Kim

at SAMSUNG Electronics Co Ltd

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Publications (1)

Proceedings Article | 21 November 2023 Presentation + Paper

Novel method for precise curved EUV mask CD characterization by adopting machine learning

Jaeseo Lee, Inhwan Noh, Youngsu Sung, Heebom Kim, Ji-hoon Kang, Seunghye Kim, Jin Choi

Proceedings Volume 12751, 127510B (2023) https://doi.org/10.1117/12.2687781

KEYWORDS: Education and training, Machine learning, Data modeling, Algorithm development, Modeling, 3D modeling, Feature extraction, Design and modelling, Artificial neural networks, Optical proximity correction

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