Mr. Shingo Murakami Profile

Shingo Murakami

at HTL Co Japan Ltd

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Publications (1)

Proceedings Article | 21 November 2023 Presentation + Paper

Providing solutions for replacement of legacy tools with advanced features

H. Hamada, K. Egami, S. Kanai, A. Gupta, S. Murakami, K. Nakanishi, K. Matsumura, A. Acharya

Proceedings Volume 12751, 127510J (2023) https://doi.org/10.1117/12.2686670

KEYWORDS: Manufacturing, Mask making, Manufacturing equipment, Inspection, Artificial intelligence, Semiconductors, Classification systems, Photomasks

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