Since the mid-2010s, mobile organic light emitting diode (OLED) panels have increased the demand for increased resolution in Flat Panel Display (FPD) photomasks [1]. In response to this demand, a 1.5 um Line and Space target exposure system for 800ppi OLED panels ware released in the mid-2010s. In addition, exposure system manufacturers are developing 1.2um Line and Space target exposure systems to produce ultra-high-definition OLEDs in the 800-1000ppi range [2]. While photomask manufacturers are required to have defect assurance capabilities for the next generation design, there is no standard industry roadmap in the field of FPD lithography. We believe that what is really necessary for the OLED panels manufacturer is to ensure that the pattern on the photomask is transferred to the OLED panel without any problems. Instead of the assurance based on the size of the defect on the photomask, we propose a new type of photomask assurance, which is the assurance for the pattern transfer to the OLED panel by the photomask maker. In this report, we will report on our new type FPD photomask assurance proposal.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.