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Somashekara Bhat
at Indian Institute of Technology Madras
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Publications (4)
SPIE Journal Paper | 1 July 2009
Extraction of residual stress and dimensions from electrical measurements on surface micromachined test structures
JM3, Vol. 8, Issue 03, 031309, (July 2009) https://doi.org/10.1117/12.10.1117/1.3167825
KEYWORDS: Resistors, Resistance, Oxides, Etching, Surface micromachining, Thin films, Reactive ion etching, Microelectronics, Wet etching, Profilometers
Proceedings Article | 18 February 2008 Paper
Electrical measurement of undercut in surface micromachining
Proceedings Volume 6884, 68840R (2008) https://doi.org/10.1117/12.764417
KEYWORDS: Resistors, Resistance, Etching, Oxides, Metals, Surface micromachining, Wet etching, Photoresist materials, Aluminum, Dry etching
SPIE Journal Paper | 1 October 2007
Parameter extraction from simple electrical measurements on surface micromachined cantilevers
JM3, Vol. 6, Issue 04, 043013, (October 2007) https://doi.org/10.1117/12.10.1117/1.2794291
KEYWORDS: Etching, Microelectromechanical systems, Aluminum, Oxides, Profilometers, Reactive ion etching, Scanning electron microscopy, Sensors, Optical testing, Plasma
Proceedings Article | 19 January 2007 Paper
Simple measurement technique for resonance frequency of micromachined cantilevers
Proceedings Volume 6463, 64630N (2007) https://doi.org/10.1117/12.698280
KEYWORDS: Aluminum, Oxides, Optical testing, Microelectromechanical systems, Profilometers, Etching, Optical simulations, Measurement devices, Doppler effect, Scanning electron microscopy
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