Dr. Stefan Gruss Profile

Dr. Stefan Gruss

at Qimonda Dresden GmbH & Co OHG

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 24 May 2004 Paper

Stefan Gruss, Ansgar Teipel, Carsten Fuelber, Elyakim Kassel, Mike Adel, Mark Ghinovker, Pavel Izikson

Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.534518

KEYWORDS: Overlay metrology, Aluminum, Carbon, Photomasks, Semiconducting wafers, Metrology, Error analysis, Etching, Metals, Reticles

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Keywords/Phrases