Highly sensitive trace-gas sensors are required in a large range of applications, such as biological, environmental, industrial, and fundamental physics. Photoacoustic spectroscopy has the advantages of compactness and robustness and is characterized by a high degree of flexibility in its configuration, in particular in the selection of the laser source and the transducer. Here we report the experimental characterization of new silicon-based Micro electro-mechanical systems (MEMS) structures to be applied as acoustic-to-voltage transducers in a photo-acoustic-based sensor. In our setup, a 4.5 μm continuous wave quantum cascade laser is used to address strong N2O roto-vibrational transition, and the detection of MEMS oscillations is performed via a balanced interferometric readout.
In the race toward increasingly high-performance trace-molecule sensors, one of the most significant steps forward in the last decade for photoacoustic sensors was their combination with high-finesse optical cavities. Validated with different configurations, this technique demonstrated enhanced sensitivities below the part-per-trillion level (ppt) and record dynamic ranges. Here we present our advanced cantilever-based photoacoustic setup, based on a custom-made silicon cantilever embedded in a doubly-resonant configuration. The combination of a high-quality-factor acoustic resonator and a high-finesse optical cavity allows a final sensitivity enhancement by several orders of magnitude. The sensor was tested on strong N2O transitions around 4.5 μm wavelength with a continuous-wave quantum cascade laser.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.