Mr. Suil Cho Profile

Suil Cho

at SAMSUNG Electronics Co Ltd

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Publications (1)

Proceedings Article | 20 June 2021 Presentation + Paper

Angstrom-accuracy multilayer thickness determination using optical metrology and machine learning

Hyunsoo Kwak, Sungyoon Ryu, Suil Cho, Junmo Kim, Yusin Yang, Jungwon Kim

Proceedings Volume 11782, 117820U (2021) https://doi.org/10.1117/12.2592216

KEYWORDS: Machine learning, Data modeling, Transmission electron microscopy, Statistical modeling, Semiconductors, Optical metrology, 3D metrology, Target detection, Ultrafast phenomena, Spectroscopic ellipsometry

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