Dr. Sung-Hwan Yoon
Graduate Student at Univ of Massachusetts/Lowell
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 23 October 2006 Paper
Sung-hwan Yoon, Junseok Lee, Keun Park, Joey Mead, Shinji Matsui, Carol Barry
Proceedings Volume 6380, 63800K (2006) https://doi.org/10.1117/12.686310
KEYWORDS: Silicon, Polymers, Atomic force microscopy, Semiconducting wafers, Scanning electron microscopy, Surface roughness, Solids, Manufacturing, Digital video discs, Electron beam lithography

Proceedings Article | 16 May 2005 Paper
Sung-hwan Yoon, Chinnawat Srirojpinyo, Jun Lee, Joey Mead, Shinji Matsui, Carol Barry
Proceedings Volume 5763, (2005) https://doi.org/10.1117/12.599959
KEYWORDS: Silicon, Semiconducting wafers, Gallium arsenide, Polymers, Titanium, Coating, Surface roughness, Metals, Scanning electron microscopy, Electron beam lithography

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