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Dr. Sung-Won Youn
at National Institute of Advanced Industrial Science and Technology
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Author
Publications (1)
Proceedings Article | 29 September 2023 Paper
Ultra-high throughput electron beam lithography for wafer size nanoimprint mold fabrication
Takaomi Ito, Takumi Watanabe, Satoshi Nagai, Sung-won Youn, Kenta Suzuki, Hiroshi Hiroshima
Proceedings Volume 12915, 1291507 (2023) https://doi.org/10.1117/12.2684952
KEYWORDS: Electron beam lithography, Nanoimprint lithography, Semiconducting wafers, Silicon, Fabrication, Scanning electron microscopy, Distortion, Nanolithography, Color, Vestigial sideband modulation
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