KEYWORDS: Reflectors, Sensors, Phase shifts, Temperature sensors, Network security, Finite element methods, Temperature metrology, Microsensors, Reflectivity, Microelectromechanical systems
This paper presents an integrated multifunctional microsensor based on 440MHz surface acoustic wave (SAW) reflective delay line on 41° YX LiNbO3. A pressure sensor, a temperature sensor, and radio frequency identification (RFID) tag were integrated on two-bonded piezoelectric substrates. The pressure sensor was placed on the top plate, whereas the RFID tag and temperature sensor were located on the bottom substrate. Finite Element Methods (FEM) and Coupling of mode (COM) modeling were performed to extract the optimal design parameters before fabrication. The fabricated sensor was wirelessly characterized through the Network Analyzer. Sharp reflection peaks with high S/N ratio were observed. Obtained temperature and pressure sensitivity are ~10°/°C and ~2.9°/kPa, respectively.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.