Femtosecond laser direct writing technique is a powerful tool to integrate micro-optics, compared to a conventional
method of assembling bulk micro-optics. This technique has a great advantage to save the assembly time and to confirm
effects of integration in short time. In this paper, we demonstrate the integration of a micro grating and a diffractive lens
inside bulk silica glass by using the femtosecond laser direct writing technique. The grating can split an input beam into
several numbers of beams and the diffractive lens can focus the beam at its focal plane. Therefore the integrated optics
has a new function of the combination of the splitting and the focusing. Moreover we demonstrate the integration of two
diffractive lenses inside silica glass and a pin hole on its surface. The integrated optics can realize collimating and
focusing simultaneously. From the industrial point of view, we propose two potential applications: a high efficiency
photo detector and a miniature spectrometer. Device concepts and the evaluation results are described.
Precision micro holes and structures with smooth internal surfaces are introduced. We adopted a high repetition rate femtosecond laser to form optically damaged structures inside a silica glass. The glass is dissolved by HF aqueous solution after the laser irradiation. Through this process, we could obtain micro structures with smooth internal surfaces. We investigated the effects of laser repetition rate on surface roughness. It is suggested that one of the causes increased hole surface roughness is the increase in the defects by the laser irradiation.
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