Dr. Tenko Yamashita Profile

Dr. Tenko Yamashita

at IBM Corp

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Author

Publications (3)

Proceedings Article | 10 April 2024 Presentation

EUV double patterning solution for subtractive metal patterning at 18nm pitch

Christopher Penny, Koichi Motoyama, Hosadurga Shobha, Nabil Azad, Taesun Kim, Shravana Katakam, Johnsoo Kim, Joe Lee, Gideon Oyibo, Jaemyung Choi, Stuart Sieg, Tenko Yamashita, John Arnold, Kisik Choi

Proceedings Volume PC12958, (2024) https://doi.org/10.1117/12.3016092

KEYWORDS: Optical lithography, Extreme ultraviolet, Double patterning technology, Metals, Design and modelling, Ruthenium, Extreme ultraviolet lithography, Copper, Resistors, Resistance

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Proceedings Article | 19 March 2018 Presentation

Novel hybrid metrology for process integration of gate all around (GAA) devices (Conference Presentation)

Gangadhara Muthinti, Nicolas Loubet, Robinhsinkuo Chao, Abraham Arceo De La Pena, Dexin Kong, Juntao Li, Brock Mendoza, Veeraraghavan Basker, Tenko Yamashita, John Gaudiello, Matthew Sendelbach, Aron Cepler, Susan Ng-Emans, Gilad Barak, Wei Ti Lee

Proceedings Volume 10585, 105850Z (2018) https://doi.org/10.1117/12.2297500

KEYWORDS: Metrology, Gallium arsenide, Etching, Silicon, Measurement devices, Geometrical optics, X-ray fluorescence spectroscopy, Semiconductors, Nanolithography

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Proceedings Article | 31 March 2017 Paper

Materials characterization for process integration of multi-channel gate all around (GAA) devices

Gangadhara Raja Muthinti, Nicolas Loubet, Robin Chao, Abraham de la Peña, Juntao Li, Michael Guillorn, Tenko Yamashita, Sivananda Kanakasabapathy, John Gaudiello, Aron Cepler, Matthew Sendelbach, Susan Emans, Shay Wolfling, Avron Ger, Daniel Kandel, Roy Koret, Wei Ti Lee, Peter Gin, Kevin Matney, Matthew Wormington

Proceedings Volume 10145, 101451U (2017) https://doi.org/10.1117/12.2261377

KEYWORDS: Germanium, Silicon, Diffractive optical elements, Gallium arsenide, Semiconducting wafers, Etching, Solids, X-ray diffraction, X-ray fluorescence spectroscopy, Materials processing

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