Dr. Tetsuya Nishiguchi Profile

Dr. Tetsuya Nishiguchi

at Meiden Nanoprocess Innovations Inc

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Publications (2)

Proceedings Article | 3 October 2024 Presentation

Comparison of long-term resilience of aluminum oxide protective coating on Ag-mirrors via low temperature atomic layer deposition using water and high-purity ozone as oxygen precursors

Søren Tornøe, Brandon Cheney, Andrew Phillips, Takayuki Hagiwara, Tetsuya Nishiguchi, Nobuhiko Kobayashi

Proceedings Volume PC13114, PC1311404 (2024) https://doi.org/10.1117/12.3028878

KEYWORDS: Protective coatings, Ozone, Oxygen, Atomic layer deposition

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Proceedings Article | 26 August 2024 Presentation

Progressive structural changes in silver-based telescope mirrors with an aluminum oxide protection layer prepared via thermal atomic layer deposition using water and high purity ozone: a comparative study for long-term resilience (Conference Presentation)

Søren Tornøe, Brandon Cheney, Andrew Phillips, Takayuki Hagiwara, Tetsuya Nishiguchi, Nobuhiko Kobayashi

Proceedings Volume 13100, 131001Z (2024) https://doi.org/10.1117/12.3010997

KEYWORDS: Atomic layer deposition, Protective coatings, Ozone, Vacuum chambers, Telescopes, Statistical analysis, Reflectivity, Mirrors, Aluminum mirrors, Oxygen

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