Mr. Thomas P. Kuehn Profile

Thomas P. Kuehn

at Univ of Minnesota

SPIE Involvement:

Author

Publications (1)

This will count as one of your downloads.

You will have access to both the presentation and article (if available).

DOWNLOAD NOW

This content is available for download via your institution's subscription. To access this item, please sign in to your personal account.

Email or Username Forgot your username?

Password Forgot your password?

Show

Keep me signed in

No SPIE account? Create an account

Proceedings Article | 19 January 2007 Paper

Testing reliability of MEMS materials in liquids

Thomas Kuehn, S. Mubassar Ali, Susan Mantell, Ellen Longmire

Proceedings Volume 6463, 64630L (2007) https://doi.org/10.1117/12.706552

KEYWORDS: Silicon, Liquids, Microelectromechanical systems, Ferroelectric materials, Reliability, Actuators, Alternate lighting of surfaces, LabVIEW, Environmental sensing, Magnetism

Read Abstract +

MEMS are increasingly being considered for applications that involve immersion in liquids. However, there are very little reliability data for MEMS structures in liquids environments. In this study, an apparatus was developed which enables the investigation of fatigue failure of MEMS in liquids. MEMS cantilever beams were mounted on a PZT piezoelectric actuator and immersed in a liquid. A laser is reflected off the tip of the vibrating cantilever and onto a position-sensing photo-diode device (PSD) to obtain position data. From this data resonance frequency can be extracted for long-term monitoring. Cantilevers are resonated for at least 10⁸ cycles. This apparatus allows for the testing of many combinations of materials and environments. For this study, the fatigue performance in liquid of silicon nitride cantilever beams was evaluated and compared to single crystal silicon cantilever beams. Tests were conducted in deionized water and a saline solution. Silicon nitride exhibited no long-term degradation of resonance frequency within measurement limits in air, DI water, and saline environments. Silicon exhibited a steady decrease in resonance. Results showed that this method could be extended to conduct reliability studies on other MEMS materials.

My Library

You currently do not have any folders to save your paper to! Create a new folder below.

Folder Name

Folder Description

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks. You are receiving this notice because your organization may not have SPIE eBooks access.*

*Shibboleth/Open Athens users─please sign in to access your institution's subscriptions.

To obtain this item, you may purchase the complete book in print or electronic format on SPIE.org.

ORGANIZATIONAL
Sign in with credentials provided by your organization.

Organizational Username

Organizational Password

Show/Hide Password

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members:

Non-members: ADD TO CART

Keywords/Phrases

Search In:

Publication Years