Using excimer laser with 248 nm wavelength, we have been developed the 45-degree micro-mirrors in the polymer
optical waveguide constructed by newly developed epoxy resin. The three-dimensional laser processing technology for
controlling the mask aperture size on the laser beam is effective for fabricating the 45-degree mirror. The size of the
mirror was about 80 micrometer width. Although the periodical micro patterns have appeared on the surface of the
mirrors, we have successfully removed the patterns by the technique of smoothing. Smoothing process has been carried
out by the additional laser irradiation with weak and/or strong energy. The obtained surface roughness of the mirrors was
less than 120 nm (Ry). The evaluation of the optical loss using laser with 670 nm wavelength resulted in the less than 0.5
dB, indicating sufficient mirror performance.
Conference Committee Involvement (4)
Laser-based Micro- and Nanopackaging and Assembly V
26 January 2011 | San Francisco, California, United States
Laser-based Micro- and Nanopackaging and Assembly IV
27 January 2010 | San Francisco, California, United States
Laser-based Micro- and Nanopackaging and Assembly III
28 January 2009 | San Jose, California, United States
Laser-Based Micro- and Nano-Packaging and Assembly II
22 January 2008 | San Jose, California, United States
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