Travis R. Young
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 4 October 2023 Presentation
Proceedings Volume PC12646, PC126460T (2023) https://doi.org/10.1117/12.2678379
KEYWORDS: Fabrication, Etching, Electron beam lithography, Dielectrics, Defense and security, Silicon, Organization management, Nanotechnology, Materials processing, Lithography

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