KEYWORDS: Diamond, Optics manufacturing, Diamond turning, LCDs, Polymers, Ion beams, Prototyping, Electron beam lithography, Manufacturing, Single point diamond turning
Over the years there have been demonstrations of various methods capable of forming
sub-micron features such as photo, electron beam, and imprint lithography. Generally
these methods are limited to planar master tools of limited dimensional size. The
subsequent replication processes using these master tools are typically a batch or a rollto-
roll process with a tiled master roll tool. Presented here is a novel method for the large
scale manufacturing of sub-micron structures via a roll-based mastering method suitable
for industrial scale, based on a modification of single point diamond turning.
Single point diamond turning has been exploited successfully to generate a wide range of
optical structures from discrete optical components to large area micro-optic based films
such as brightness enhancement films (BEF) for LCD displays. By applying advanced
ion-milling techniques to structure diamond tools, it is possible to increase the
complexity and ultimate dimensional resolution of diamond machined masters.
Laser Induced Thermal Imaging (LITI) allows for high-resolution patterning of a variety of materials that often cannot be patterned efficiently by other conventional techniques such as photolithography. Application of LITI towards patterning vacuum-coated OLED materials is particularly attractive because of high LITI patterning resolution and accuracy and good compatibility of vacuum-coated OLED materials. However, LITI may induce thermal transfer defects within OLED materials. We are developing methods to address these potential thermal defects while maintaining patterning quality, device operation efficiency, voltage, and lifetime. Recent results regarding optimization of LITI for patterning vacuum-coated OLEDs will be discussed.
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