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Wei Jiang
at Beijing Institute of Technology
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Publications (1)
Proceedings Article | 30 December 2004 Paper
Simulation and comparison of movable membrane design for MEMS Fabry-Perot tunable filter
Wei Jiang, Fang Cui, Yu-nan Sun
Proceedings Volume 5641, (2004) https://doi.org/10.1117/12.575143
KEYWORDS: Tunable filters, Microelectromechanical systems, Fabry–Perot interferometers, Reflectors, Electrodes, Finite element methods, Reflectivity, Wavelength division multiplexing, Silicon, Channel projecting optics
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